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Three-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
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Fengfeng Zhou, Xingyu Fu, Siying Chen, Changheon Han, Martin B. G. Jun
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146 |
7 |
070907–None |
2024 |
59.12 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Hole Edge Metrology and Inspection by Edge Diffractometry
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Kuan Lu, ChaBum Lee
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146 |
7 |
070905–None |
2024 |
56.45 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Classification of Chip-Level Defect Types in Wafer Bin Maps Using Only Wafer-Level Labels
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Hyuck Lee, Hyeonwoo Kim, Heeyoung Kim
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146 |
7 |
070902–None |
2024 |
55.28 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Multi-Pass Laser Polishing of As-Built Directed Energy Deposition Surfaces
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Arpan Patel, Samantha Webster, Jian Cao, Kornel Ehmann
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146 |
7 |
071002–None |
2024 |
53.53 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Auto-Labeling for Pattern Recognition of Wafer Defect Maps in Semiconductor Manufacturing
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Shu-Kai S. Fan, Pei-Chen Chen, Chih-Hung Jen, Kanchana Sethanan
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146 |
7 |
070904–None |
2024 |
50.51 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Few-Shot Classification of Wafer Bin Maps Using Transfer Learning and Ensemble Learning
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Hyeonwoo Kim, Heegeon Yoon, Heeyoung Kim
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146 |
7 |
070903–None |
2024 |
49.53 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Wafer Edge Metrology and Inspection Technique Using Curved-Edge Diffractive Fringe Pattern Analysis
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Kuan Lu, Zhikun Wang, Heebum Chun, ChaBum Lee
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146 |
7 |
070908–None |
2024 |
48.74 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Hybrid Semiconductor Wafer Inspection Framework via Autonomous Data Annotation
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Changheon Han, Heebum Chun, Jiho Lee, Fengfeng Zhou, Huitaek Yun, ChaBum Lee, Martin B.G. Jun
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146 |
7 |
070906–None |
2024 |
47.66 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Measurement of Thermal Field Temperature Distribution Inside Reaction Chamber for Epitaxial Growth of Silicon Carbide Layer
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Shiwei Deng, Yancheng Wang, Jiafeng Cheng, Wenjie Shen, Deqing Mei
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146 |
7 |
070901–None |
2024 |
40.13 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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Investigation of Fiber Orientation of Fused Filament Fabricated CFRP Composites via an External Magnetic Field
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Haoran Zhang, Kaifeng Wang
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146 |
7 |
071001–None |
2024 |
36.84 |
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平均評価: 0.0 / 5
(0 件のレビュー)
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