Machining Complex Three-Dimensional Nanostructures With an Atomic Force Microscope Through the Frequency Control of the Tip Reciprocating Motions
['Yanquan Geng', 'Yongda Yan', 'Emmanuel Brousseau', 'Xing Cui', 'Bowen Yu', 'Xuesen Zhao', 'Zhenjiang Hu']
/
Journal of Manufacturing Science and Engineering
/ Vol. 138
/ No. 12
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