Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
['Jiqiang Wang', 'Yanquan Geng', 'Zihan Li', 'Yongda Yan', 'Xichun Luo', 'Pengfei Fan']
/
Journal of Manufacturing Science and Engineering
/ Vol. 144
/ No. 4
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