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The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

['Yizhao Guan', 'Hiromasa Kume', 'Shotaro Kadoya', 'Masaki Michihata', 'Satoru Takahashi']   /   Journal of Manufacturing Science and Engineering / Vol. 144 / No. 3
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