Concept of Error Compensation for Nonorthogonality in Two-Axis Displacement Measurement System Utilizing Single Grating Scale and Littrow Configuration
['Masaki Michihata', 'Souki Fujimura', 'Shuzo Masui', 'Satoru Takahashi']
/
Journal of Manufacturing Science and Engineering
/ Vol. 147
/ No. 1
まだレビューは投稿されていません。あなたが最初のレビューを書きませんか？