Development of rotary table grinding machine for large diameter Si wafers (1st report: Performance investigation of water hydrostatic rotary table)
['Jumpei KUSUYAMA', 'Ayumu HONDA', 'Takayuki KITAJIMA', 'Go OKAHATA', 'Akinori Y ...']
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Transactions of the JSME (in Japanese)
/ Vol. 82
/ No. 842
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