Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization
['Yu YAMASHITA', 'Yasuko TANAKA', 'Tianzhou CHEN', 'Yoshihiro TAGUCHI', 'Masaaki ...']
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Mechanical Engineering Journal
/ Vol. 11
/ No. 6
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