Characteristics of the Hf0.5Zr0.5O2 Thin Films Grown by a Chemical Solution Deposition Method
['Mitsuaki YANO', 'Taichi INOUE', 'Hiroshi OTA', 'Taiki KAWAMOTO', 'Yuichi HIROF ...']
/
Journal of the Society of Materials Science, Japan
/ Vol. 68
/ No. 10
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