Development of fast atom beam source with bidirectional magnetic field for enhanced surface activated bonding
['Yuki MIYOSHI', 'Taisei KATO', 'Kyosuke OSHIMA', 'Taichi HINO', 'Takahiro YAMADERA', 'Chiemi OKA', 'Junpei SAKURAI', 'Seiichi HATA']
/
Mechanical Engineering Journal
/ Vol. 13
/ No. 4
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